Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition
| Autor: | M. U. Hajiev, V. A. Pak, I. G. Atabaev, S. B. Zakirova, Kh. N. Juraev |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Fabrication Materials science Renewable Energy Sustainability and the Environment Inorganic chemistry chemistry.chemical_element 02 engineering and technology Chemical vapor deposition 021001 nanoscience & nanotechnology 01 natural sciences Indium tin oxide chemistry Volume (thermodynamics) Chemical engineering 0103 physical sciences 0210 nano-technology Tin Indium Evaporator Transparent conducting film |
| Zdroj: | Applied Solar Energy. 52:118-121 |
| ISSN: | 1934-9424 0003-701X |
| DOI: | 10.3103/s0003701x16020079 |
| Popis: | ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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