Embedded Integration of Sb2Se3 Film by Low-Temperature Plasma-Assisted Chemical Vapor Reaction with Polycrystalline Si Transistor for High-Performance Flexible Visible-to-Near-Infrared Photodetector

Autor: Ying-Chun Shen, Cheng-Yu Lee, Hsing-Hsiang Wang, Ming-Hsuan Kao, Po-Cheng Hou, Yen-Yu Chen, Wen-Hsien Huang, Chang-Hong Shen, Yu-Lun Chueh
Rok vydání: 2023
Předmět:
Zdroj: ACS Nano. 17:2019-2028
ISSN: 1936-086X
1936-0851
Databáze: OpenAIRE