Analysis of the Williams-Hayfield Model for Oxidation Kinetics

Autor: A. T. Fromhold
Rok vydání: 2006
Předmět:
Zdroj: Journal of The Electrochemical Society. 153:B97
ISSN: 0013-4651
Popis: A theoretical analysis is presented for the physical model of thermal oxidation proposed by Williams and Hayfield. A rate dLldt ∞ exp[-(L/L crit ) 2 ] is deduced herein for oxide film thickness L as a function of time t. The growth rate exponential falloff parameter is L crit = √2ekT/n e e 2 , where n e is a uniform density of trapped electrons in the oxide, T is the Kelvin temperature, and the parameters e, k, and e are the static dielectric constant of the oxide, Boltzmann's constant, and electronic charge magnitude, respectively. Numerical computations compare this rate law with the logarithmic growth law proposed in the original analysis.
Databáze: OpenAIRE