In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer
| Autor: | Qiangwei Xu, Ji Fan, Dandan Liu, Huafeng Liu, Yuanlei Wang, Jinquan Liu, Liang-Cheng Tu, Wenjie Wu, Shitao Yan |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Materials science Acoustics Thermistor Sense (electronics) Atmospheric temperature range Accelerometer Scale factor Temperature measurement ComputerSystemsOrganization_MISCELLANEOUS Hardware_INTEGRATEDCIRCUITS Electrical and Electronic Engineering Instrumentation Temperature coefficient |
| Zdroj: | IEEE Sensors Journal. 21:19872-19880 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2021.3098797 |
| Popis: | The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification of an in-situ compensation method on the temperature coefficient of the scale factor for a single-axis electromagnetic force-balance feedback MEMS accelerometer. A micro thermistor, fabricated together with the MEMS accelerometer, is integrated to in-situ sense the temperature variation of the accelerometer. The thermistor is connected to the voltage-to-current resistance in series, which compensates the variation of the scale factor of the accelerometer that is influenced by temperature variation. The experimental results reveal that the temperature coefficient of the scale factor of the compensated accelerometer is within 6 ppm/°C for the temperature range from 25°C to 50°C, which is reduced by 68 times compared with the uncompensated accelerometer. Benefiting from the compatible fabrication process and the in-situ compensation, the proposed method is promising to be low-cost and high-efficiency. |
| Databáze: | OpenAIRE |
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