Effects of prism beam expander and slits on excimer laser linewidth narrowing module
| Autor: | Jun Zhou, Zhijun Yuan, Yunrong Wei, Qihong Lou, Haibo Zhang |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Excimer laser business.industry medicine.medical_treatment Physics::Optics Laser Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Laser linewidth Optics law medicine Optoelectronics Beam expander Physics::Atomic Physics Prism Slit width Electrical and Electronic Engineering Pulse energy business Astrophysics::Galaxy Astrophysics Echelle grating |
| Zdroj: | Chinese Optics Letters. 11:041405-41408 |
| ISSN: | 1671-7694 |
| DOI: | 10.3788/col201311.041405 |
| Popis: | Theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. With a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. However, the pulse energy can be improved by optimally designing the prism beam expander. In addition, a subpicometer linewidth ArF laser is obtained with a double-prism beam expander and an echelle grating. |
| Databáze: | OpenAIRE |
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