ZrO2 optical coatings with high toughness deposited by magnetron sputtering

Autor:	Jincheng Qian, Bill Baloukas, Etienne Bousser, Carlo A. Kosik Williams, James J. Price, Charles A. Paulson, Shandon D. Hart, Karl W. Koch, Robert A. Bellman, Jolanta Klemberg-Sapieha, Ludvik Martinu
Rok vydání:	2022
Zdroj:	Optical Interference Coatings Conference (OIC) 2022.
Popis:	ZrO2 coatings deposited by low duty cycle pulsed DC magnetron sputtering exhibit good optical properties, low compressive stress (-110 MPa), and excellent mechanical properties (a hardness of ~14 GPa, a toughness of > 3 MPa∙m-2).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::659c91409e78692daef9530589e1348a https://doi.org/10.1364/oic.2022.tha.6 Zobrazit plný text záznamu