| Autor: |
Kyaw Zin Linn, Kyaw Myo Aung, Boris M. Simonov, Victor V. Kalugin |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus). |
| Popis: |
To improve the sensitivity of the MEMS comb — drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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