Process queue time control, reactive or proactive?

Autor:	Vickie Jophlin-Gut, Edward Sherwood, Laura Bauman, Rebekah Sheraw, Chienfan Yu, Michael Carbonnell, Katherine Hawkins, Zoey Sowinski, Ryan Kelly, Garrett Oakley
Rok vydání:	2018
Předmět:	0209 industrial biotechnology 020901 industrial engineering & automation Computer science Control theory Control (management) Process (computing) Process control Queue time 02 engineering and technology Sensitivity (control systems)
Zdroj:	2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Popis:	Process queue time control is a trade-off between defect and tool utilization. Three cases of queue time sensitivity discovered in active silicon (RX) module in our fab are discussed in this paper which led us to take a more pro-active approach to impose queue time control.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::65785c02f30f986c1d7c02160cb7296b https://doi.org/10.1109/asmc.2018.8373185 Zobrazit plný text záznamu