Bistable Thin-Film Shape Memory Actuators for Applications in Tactile Displays

Autor:	Roman Vitushinsky, Alfred Ludwig, Sam Schmitz
Rok vydání:	2009
Předmět:	Materials science Bistability business.industry Mechanical Engineering Transistor Shape-memory alloy Sputter deposition law.invention law Microsystem Electronic engineering Optoelectronics Electrical and Electronic Engineering Thin film business Actuator Voltage
Zdroj:	Journal of Microelectromechanical Systems. 18:186-194
ISSN:	1941-0158 1057-7157
Popis:	Bistable shape memory actuators were fabricated by microsystem technology processes and characterized with regard to their use in tactile graphic displays. The actuators were realized as sputter-deposited buckled metallic thin-film carriers, having structured Ti-Ni-Cu and Ti-Ni-Hf shape memory alloys on the top and at the bottom, respectively. They were sputtered on wavy-structured substrate and had lateral dimensions ranging from 2.2 to 3.5 mm in width and from 1 to 3 mm in length. The actuators were switched with voltages in the range of 0.2 to 0.8 V and with currents in the range of 0.2 to 0.8 A. A force of 2.2 mN with a displacement of 0.7 mm was reached. To improve the performance further, a special test setup was developed. The bistable actuators in it were sputtered on a planar substrate with lateral dimensions ranging from 6 to 8 mm in width and from 3 to 6 mm in length. These actuators were switched with actuation voltages in the range of 0.6 to 1.6 V and with currents in the range of 0.6 to 1.8 A. Thus, a force of 16 mN with a displacement of 1.2 mm was reached.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6576961e325d689bc0451766d921f897 https://doi.org/10.1109/jmems.2008.2009816 Zobrazit plný text záznamu