A 200 μg/√Hz, 2.7 milli-g Offset Differential Interface for Capacitive Micro Accelerometer
| Autor: | Rakesh Tirupathi, Sougata Kumar Kar |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Physics
Microelectromechanical systems Offset (computer science) business.industry Capacitive sensing 020208 electrical & electronic engineering 010401 analytical chemistry 02 engineering and technology Accelerometer 01 natural sciences Noise floor 0104 chemical sciences law.invention Capacitor Application-specific integrated circuit law Hardware_INTEGRATEDCIRCUITS 0202 electrical engineering electronic engineering information engineering Optoelectronics Demodulation Electrical and Electronic Engineering business |
| Zdroj: | IEEE Transactions on Circuits and Systems II: Express Briefs. 68:1753-1757 |
| ISSN: | 1558-3791 1549-7747 |
| DOI: | 10.1109/tcsii.2020.3041614 |
| Popis: | This brief presents a switched-capacitor based low offset differential output sensor interface for MEMS capacitive accelerometers. The proposed interface employs an improved demodulation scheme by using a fully differential op-amp and a modified clocking scheme to reduce the zero-g offset. The interfacing Application Specific Integrated Circuit (ASIC) is designed and fabricated using UMC 180 nm CMOS process technology. The fabricated ASIC is integrated with a MEMS capacitive acceleration sensor and the measured results are presented. The proposed configuration achieves maximum sensitivity of 1.45 V/g with less than 2% non-linearity error. The zero-g offset is less than 3 milli-g while the noise floor is 200 $\mu \text{g}/\sqrt {Hz}$ approximately. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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