Mid-infrared Absorption of Femtosecond Laser Microstructured Silicon Formed in Different Gas Ambient
| Autor: | Wang Guifu, Zhao Li, Sun Haibin, Sun Sheng-li, Chen Fuchu |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Silicon business.industry Doping chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention 010309 optics Sulfur hexafluoride chemistry.chemical_compound chemistry Impurity law 0103 physical sciences Femtosecond Optoelectronics Surface layer 0210 nano-technology Absorption (electromagnetic radiation) business |
| Zdroj: | Conference on Lasers and Electro-Optics. |
| Popis: | We researched the mid-infrared absorption changes of micro-structured silicon prepared in SF6, N2, and NF3, the different changes mainly due to the concentrations of impurities doped in surface layer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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