Correlation between Tribological Properties, sp²/sp³-Ratio and H-Content of Low-Wear Diamond-Like Carbon (DLC) Layers
| Autor: | Wolfgang Tillmann, Fabian Hoffmann, Evelina Vogli, Gottlieb S. Oehrlein, Elliot A. J. Bartis |
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| Rok vydání: | 2012 |
| Předmět: |
Materials science
Hydrogen Diamond-like carbon Mechanical Engineering Analytical chemistry chemistry.chemical_element Nanoindentation Condensed Matter Physics chemistry X-ray photoelectron spectroscopy Mechanics of Materials Ellipsometry General Materials Science Capacitively coupled plasma Carbon Deposition (law) |
| Zdroj: | Materials Science Forum. :2596-2601 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.706-709.2596 |
| Popis: | It has been established that hardness and density of diamond-like carbon (DLC) layers can be raised by increasing ion energy during deposition, decreasing H-content and by increasing sp3-fraction. To confirm differences in hydrogen content of hydrogen containing and hydrogen free DLC films deposited at different bias voltages, layers were etched in oxygen atmosphere in a capacitively coupled plasma device. By employing real-time ellipsometry measurements, the H-content of the hydrogen containing a-C:H layers were estimated by determining the optical constants n and k (n-real part and k-imaginary part of the refractive index). In addition, DLC layers were analyzed by X-ray photoelectron spectroscopy to estimate the ratio of sp²- and sp³-hybridization. The mechanical and tribological properties of the coatings were evaluated by means of nanoindentation and ball-on-disc-tests. Finally correlations between these properties, H-content and sp3/sp2-ratio were obtained in an effort to explain different tribological behaviors of DLC-layers. |
| Databáze: | OpenAIRE |
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