Gas source chemical vapor deposition of hexagonal boron nitride on C-plane sapphire using B2H6 and NH3

Autor:	Anushka Bansal, Xiaotian Zhang, Joan M. Redwing
Rok vydání:	2021
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Journal of Materials Research. 36:4678-4687
ISSN:	2044-5326 0884-2914
DOI:	10.1557/s43578-021-00446-5
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6502bbfeab9f6ea5271c6f51c50e451d https://doi.org/10.1557/s43578-021-00446-5 Zobrazit plný text záznamu Full text from SpringerLink