Diffractive optics based on modulated subwavelength-domain V-ridge gratings
| Autor: | Antonie Verhoeven, Jani Tervo, Jari Turunen, Markku Kuittinen, Gaurav Bose, Ismo Vartiainen, Matthieu Roussey |
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| Rok vydání: | 2016 |
| Předmět: |
Diffraction
Materials science Silicon business.industry Physics::Optics chemistry.chemical_element 02 engineering and technology Beam splitting Grating 021001 nanoscience & nanotechnology Diffraction efficiency 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials 010309 optics Metal deposition Optics chemistry 0103 physical sciences Optoelectronics 0210 nano-technology business Anisotropy Lithography |
| Zdroj: | Journal of Optics. 18:085602 |
| ISSN: | 2040-8986 2040-8978 |
| DOI: | 10.1088/2040-8978/18/8/085602 |
| Popis: | We study the properties of reflection-type V-ridge gratings in the subwavelength domain and describe a method to realize diffractive optical elements by using such gratings as signal carriers. In particular, we utilize a coding scheme based on position modulation of a high-frequency V-ridge carrier grating. We design and demonstrate beam splitting elements using this coding scheme, electron-beam lithography, anisotropic wet etching of silicon, hot embossing of polymer, and metal deposition. These elements have the outstanding property of operating over a large spectral range from 406 to 520 nm. The measured diffraction patterns show excellent agreement with theoretical results given by rigorous diffraction theory. |
| Databáze: | OpenAIRE |
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