Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma

Autor:	Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki, Hirotaka Toyoda
Rok vydání:	2023
Předmět:	General Engineering General Physics and Astronomy
Zdroj:	Japanese Journal of Applied Physics. 62:SI1003
ISSN:	1347-4065 0021-4922
DOI:	10.35848/1347-4065/acb6a1
Popis:	The time dependence of the ion composition in pulse-modulated dual-frequency capacitively coupled plasma with Ar/C4F8/O2 was measured using a quadrupole mass spectrometer with an electrostatic energy analyzer. After turning on the pulse, Ar+ ions were preferentially generated, and then, the composition of C x F y + ions, such as C2F4 + and C3F5 + ions, increased. This phenomenon was discussed on the basis of the time variation of electron temperature and the resultant change in the ratio of the C4F8 ionization rate to that of Ar atoms.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::64d3c34552968649517fda51b7b1c45f https://doi.org/10.35848/1347-4065/acb6a1 Zobrazit plný text záznamu