Micromachined Loop Antennas on Low Resistivity Silicon Substrates

Autor:	Anders Rydberg, Katia Grenier, Erik Öjefors, Robert Plana, Henrik Kratz
Rok vydání:	2006
Předmět:	Materials science Silicon business.industry Loop antenna Antenna aperture chemistry.chemical_element Slot antenna Surface micromachining chemistry K band Optoelectronics Electrical and Electronic Engineering Antenna (radio) Silicon oxide business
Zdroj:	IEEE Transactions on Antennas and Propagation. 54:3593-3601
ISSN:	0018-926X
DOI:	10.1109/tap.2006.886532
Popis:	The integration of K-band (20-40 GHz) full wavelength square wire- and slot-loop antennas on low resistivity (11-70 Omegacm) silicon substrates is addressed. By the use of polymer or silicon oxide/nitride membranes to support the slot or wire loop over micromachined trenches the efficiency of the antennas is enhanced while the majority of the bulk silicon within the aperture of the antenna is preserved to enable the integration of active devices. A 3.6times3.6 mm2 large slot loop antenna chip with 200 mum micromachined trench width yields 1.5 dBi gain at 29.5 GHz, while 1.0 dBi gain is obtained at 24 GHz for a wire loop antenna on a 4.5times4.5 mm2 large chip with 360 mum wide trenches
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::64bd8da52700ef546a14818d9d971f85 https://doi.org/10.1109/tap.2006.886532 Zobrazit plný text záznamu