Growth And Characterization Of High Purity H2-In-HCl-PH3 Vapor Phase Epitaxy (VPE) InP

Autor: T. J. Roth, T. S. Low, L. M. Zinkiewicz, G. E. Stillman, Brian Skromme
Rok vydání: 1982
Předmět:
Zdroj: Semiconductor Growth Technology.
ISSN: 0277-786X
DOI: 10.1117/12.934273
Popis: Over the past decade indium phosphide has become one of the most intensively studied semiconducting materials. A high saturation velocity and large peak to valley ratio in its velocity field characteristic make it an attractive alternative for many high performance microwave electrical devices. Interest in the InP-InGaAsP alloy system has been further stimulated by the need for emitters and detectors in the 1.3 to 1.55 μm region where the performance of low loss silica fibers is optimal. In addition, an energy gap which is nearly ideal for conversion of solar radiation to electrical power makes it an interesting compound from that point of view. The ability to grow high purity epitaxial layers is important for the evaluation of fundamental material parameters and for controlling the doping level to optimize the performance of specific devices.
Databáze: OpenAIRE