The use of fluoropolymers to protect semiconductor materials

Autor:	C.W. Extrand
Rok vydání:	2003
Předmět:	Inorganic Chemistry Toughness business.industry Chemistry Semiconductor materials Organic Chemistry Environmental Chemistry Microelectronics Nanotechnology Physical and Theoretical Chemistry business Biochemistry Integrity management
Zdroj:	Journal of Fluorine Chemistry. 122:121-124
ISSN:	0022-1139
DOI:	10.1016/s0022-1139(03)00103-9
Popis:	Fluoropolymers are the materials of choice for many materials integrity management applications within the microelectronics industry. This brief overview discusses common types of fluoropolymers and the stringent requirements of semiconductor-processing environments. Fluoropolymers are used in a wide variety of such fluid and device handling applications because they provide a unique combination of toughness, purity, and chemical resistance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6444459e71f14bc90a361f46148d5493 https://doi.org/10.1016/s0022-1139(03)00103-9 Zobrazit plný text záznamu Full Text from ScienceDirect