A New Simple Fabrication Method for Silicon Nanowire-Based Accelerometers
| Autor: | Hyoungho Ko, Jinwoo Sung, Bobaro Chang, Dong-il Dan Cho, Taeyup Kim, Kyo-in Koo, Seohyeong Jang, Seung-Hyun Lee |
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| Rok vydání: | 2019 |
| Předmět: |
0209 industrial biotechnology
Fabrication Materials science SIMPLE (military communications protocol) business.industry Sensing applications Capacitive sensing 02 engineering and technology 021001 nanoscience & nanotechnology Accelerometer Piezoresistive effect 020901 industrial engineering & automation Miniaturization Optoelectronics 0210 nano-technology business Silicon nanowires |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: | 10.1109/transducers.2019.8808764 |
| Popis: | Silicon nanowire (SiNW) has received great attention in sensing applications because of its outstanding piezoresistive (PZR) effects. However, the difficulty of integrating SiNWs and sensor structures has hindered the development of various SiNW-based sensors. This paper presents a new simple, scalable fabrication method for SiNWs and its application to accelerometers. The developed method enables monolithic integration of SiNWs with sensing structures and allows controlling the dimensions of SiNWs and sensor structures independently. Furthermore, the developed method has significantly reduced fabrication complexity when compared to the previous approach by reducing the number of mask layers. In this paper, a SiNW-based PZR accelerometer is fabricated using the developed method, and experiments are performed. Compared to commercial capacitive accelerometers, the presented PZR accelerometer can reduce approximately 36 % of the total area by replacing the comb-type capacitive sensing units by much smaller SiNWs. |
| Databáze: | OpenAIRE |
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