Low-frequency capacitance–voltage characterization of deep levels in film–buffer layer–substrate GaAs structures

Autor: Inna F. Kodzhespirova, Evgeny F. Prokhorov, Yury A. Kovalenko, Nikolai B. Gorev, Sergey A. Kostylev
Rok vydání: 1999
Předmět:
Zdroj: Solid-State Electronics. 43:169-176
ISSN: 0038-1101
Popis: The low-frequency capacitance–voltage characteristic of a three-layered GaAs structure (a low-resistivity film, a buffer layer, and a semi-insulating substrate) exhibits a rising portion due to the emptying of deep levels at the film–buffer layer junction or at both the film–buffer layer and buffer layer–substrate junctions. This rising portion makes it possible to specify the effective concentration of vacant deep levels in the buffer layer and substrate which is responsible for the carrier trapping to these levels. It is shown that there is a threshold effective concentration (about 1×10 16 cm −3 ) at which a noticeable trapping emerges.
Databáze: OpenAIRE