815 High pressure jet conditioning effect of the soft polishing pad surface
| Autor: | Masashi Kitamura, Chikako Takato, Syuhei Kurokawa, Terutake Hayashi, Hirokuni Hiyama, Yuta Tokumoto, Yutaka Wada |
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| Rok vydání: | 2015 |
| Předmět: | |
| Zdroj: | The Proceedings of Conference of Kyushu Branch. :329-330 |
| ISSN: | 2424-2780 |
| DOI: | 10.1299/jsmekyushu.2015.68.329 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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