Reflectivity test of X-ray mirrors for deep X-ray lithography
| Autor: | V. Nazmov, E. Reznikova, A. Last, M. Boerner, J. Mohr |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
business.industry
X-ray Oxide Surface finish Condensed Matter Physics Reflectivity Electronic Optical and Magnetic Materials chemistry.chemical_compound Optics chemistry Hardware and Architecture Rough surface X-ray lithography Electrical and Electronic Engineering business Layer (electronics) Lithography |
| Zdroj: | Microsystem Technologies. 14:1299-1303 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | The reflectivity of grazing angle X-ray mirrors, used for X-ray deep lithography, is tested by means of a calorimetric method. A deviation in the reflectivity of a used mirror compared with the reflectivity of a clean surface is observed. This deviation is caused by an oxide layer on the mirrors surfaces. The density, thickness and roughness of the assumed oxide layers are determined experimentally. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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