Micromachining Transparent Materials by Femtosecond Laser
Autor: | Kazuya Kumagai, Mitsugu Hanabusa, Masayuki Okoshi |
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Rok vydání: | 1999 |
Předmět: | |
Zdroj: | The Review of Laser Engineering. 27:773-776 |
ISSN: | 1349-6603 0387-0200 |
Popis: | We used 790-nm, 130-fs laser pulses for micromachining transparent materials including acrylic resin, quartz, diamond, and polyvinyl chloride. Using this technique, even 20 mm thick acrylic resin could bedrilled in 15 minutes, while a precise cut 20μm in width was produced in acrylic resin 0.5 mm thick. However, cracks were produced by the technique when used to drill or cut quartz plate. A 1-mm micro-gear was fabricated using acrylic resin. |
Databáze: | OpenAIRE |
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