Effects of depolarization of polarimetric components on null ellipsometry
| Autor: | Soe-Mie F. Nee, Teresa Cole |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Materials science
business.industry Metals and Alloys Polarimeter Depolarization Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Wavelength Light intensity Optics law Ellipsometry Materials Chemistry Transmittance Mueller calculus business Monochromator |
| Zdroj: | Thin Solid Films. :90-96 |
| ISSN: | 0040-6090 |
| Popis: | Depolarization of optical components degrades the performance of a polarimeter, especially in the short wavelength region. Expressions for the light intensity in a null ellipsometer (NE) and a polarizer-sample-analyzer (PSA) system with depolarization errors in all components are given. Errors in Ψ and Δ using NE are mainly caused by depolarization of the compensator. A sample consisting of a thin sapphire slab 0.8 mm thick was tested. Δ measured by NE were shown to be accurate even for sample depolarization as large as 0.3, while those measured by rotating-analyzer ellipsometry (RAE) were seriously affected by sample depolarization. Methods for measuring depolarization were devised. The measured depolarization increases with the slit-width of the monochromator and the aperture size of irises and decreases with increasing wavelength. Depolarization spectra measured using NE, RAE and transmittance agree with one another. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect