| Autor: |
Michael Boos, Alfons Zöller, Detlef Arhilger, Harro Hagedorn |
| Rok vydání: |
2015 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
A newly developed wideband optical monitoring system is based on a fast triggered spectrometer with a high dynamic array detector with low signal noise. It is useful for fast in-situ transmittance measurements on the rotating substrate holder during the deposition. The spectra can be stored and used for reverse engineering analysis. Layer thickness control with monochromatic monitoring strategies can be applied by using a selected single wavelength from the array detector. The high dynamic detector supports the classical turning point monitoring as well as trigger-point cut-offs with online corrected end points. The basic system design and functionalities are described. The results of multilayer systems demonstrate the performance of the new developed monitoring system. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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