Development of Scanning Protoscope and Its Application

Autor:	Ken'ichi Ishikawa, Masamichi Yoshimura, Kazuyuki Ueda, Sakai Yuji
Rok vydání:	1999
Předmět:	Silicon Hydrogen business.industry Scanning electron microscope chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Pencil (optics) Optics chemistry Desorption Cathode ray Electrical and Electronic Engineering business Spectroscopy Electron gun
Zdroj:	SHINKU. 42:353-356
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.42.353
Popis:	The electron-stimulated desorption (ESD) spectroscopy is very sensitive to hydrogen. We have developed a time-offlight type ESD (TOF-ESD) analyzer which enables us to detect hydrogen and oxygen ions desorbed from solid surfaces. A pencil type electron gun which provides a fine-focused electron beam has been combined with the TOF-ESD to analyze surface distribution of hydrogen on the surfaces. Firstly pulsed beam was used at 600 eV to analyze hydrogen distribution on Cu 600-meshes at the magnifications of 450 and 2000. Obtained images are clearly realized a grid meshes as same as scanning electron images by the lateral resolution of 1 μm. A previously lithographed pattern on the silicon surface covered with atomic hydrogen was also realized by the scanning analysis of hydrogen.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6395fa6c9109e567c8ea0c39015db62f https://doi.org/10.3131/jvsj.42.353 Zobrazit plný text záznamu