Grating fabrication through x-ray lithography

Autor:	Martin Feldman, Todd R. Christenson, Pantazis Mouroulis, Aidan Shori, Li Jiang, Richard E. Muller, Daniel W. Wilson, Frank T. Hartley
Rok vydání:	2003
Předmět:	Materials science Fabrication business.industry Grating medicine.disease_cause Curvature law.invention Optics law Blazed grating medicine Optoelectronics X-ray lithography business Lithography Ultraviolet Groove (music)
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.503200
Popis:	Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. They can be generated over a considerable depth for use anywhere in the ultraviolet to middle infrared range. They can also be recorded on substrates of considerable curvature.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::638a013d0c90846d884a4e8d4d312122 https://doi.org/10.1117/12.503200 Zobrazit plný text záznamu