Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump
| Autor: | Thomas L. Schmidt, Claas Mueller, Frank Goldschmidtboeing, F. Thoma, Peter Woias, F. Pothof, Hagen Feth |
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| Rok vydání: | 2013 |
| Předmět: |
Materials science
Fabrication business.industry Back pressure Micropump Bimorph Structural engineering Condensed Matter Physics Electronic Optical and Magnetic Materials Volumetric flow rate Hardware and Architecture Valve seat Optoelectronics Electrical and Electronic Engineering business Neutral plane Voltage |
| Zdroj: | Microsystem Technologies. 20:1299-1310 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-013-1865-1 |
| Popis: | We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar. |
| Databáze: | OpenAIRE |
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