Selective Area Regrowth Produces Nonuniform Mg Doping Profiles in Nonplanar GaN p–n Junctions

Autor: Mohsen Nami, Paul J. M. Smeets, Jung Han, Alexander S. Chang, Bingjun Li, Lincoln J. Lauhon, Sizhen Wang
Rok vydání: 2021
Předmět:
Zdroj: ACS Applied Electronic Materials. 3:704-710
ISSN: 2637-6113
DOI: 10.1021/acsaelm.0c00863
Popis: Nonplanar GaN p–n junctions formed by selective area regrowth were analyzed using pulsed laser atom probe tomography. Dilute Al marker layers were used to map the evolution of the p-GaN growth inte...
Databáze: OpenAIRE