Selective Area Regrowth Produces Nonuniform Mg Doping Profiles in Nonplanar GaN p–n Junctions
Autor: | Mohsen Nami, Paul J. M. Smeets, Jung Han, Alexander S. Chang, Bingjun Li, Lincoln J. Lauhon, Sizhen Wang |
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Rok vydání: | 2021 |
Předmět: | |
Zdroj: | ACS Applied Electronic Materials. 3:704-710 |
ISSN: | 2637-6113 |
DOI: | 10.1021/acsaelm.0c00863 |
Popis: | Nonplanar GaN p–n junctions formed by selective area regrowth were analyzed using pulsed laser atom probe tomography. Dilute Al marker layers were used to map the evolution of the p-GaN growth inte... |
Databáze: | OpenAIRE |
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