The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring
| Autor: | Hee Yeoun Kim, Changho Seok, Jae Hong Park, Tae Hyun Kim, Hyoungho Ko, Gyungtae Kim |
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| Rok vydání: | 2014 |
| Předmět: |
Physics
Resistive touchscreen Correlated double sampling business.industry Capacitive sensing Electrical engineering Pressure sensor Electronic Optical and Magnetic Materials law.invention Pirani gauge Pressure measurement law Torr Optoelectronics Vacuum level Electrical and Electronic Engineering business |
| Zdroj: | JSTS:Journal of Semiconductor Technology and Science. 14:733-740 |
| ISSN: | 1598-1657 |
| DOI: | 10.5573/jsts.2014.14.6.733 |
| Popis: | A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 ㎷ / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be 268 μV rms in 0.5 ㎐ to 50 ㎐, which is 41.2% smaller than conventional CTIA. |
| Databáze: | OpenAIRE |
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