Preparation of single‐crystal Y3Al5O12thin film by metalorganic chemical vapor deposition

Autor:	G. R. Bai, C. M. Foster, H. L. M. Chang
Rok vydání:	1994
Předmět:	Materials science Physics and Astronomy (miscellaneous) Analytical chemistry chemistry.chemical_element Mineralogy Yttrium Substrate (electronics) Chemical vapor deposition Combustion chemical vapor deposition Epitaxy chemistry Electron diffraction Transmission electron microscopy Thin film
Zdroj:	Applied Physics Letters. 64:1777-1779
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.111805
Popis:	Single‐crystal yttrium aluminum garnet (Y3Al5O12 or YAG) thin films have been grown on (111) Gd3Ga5O12 substrate by metalorganic chemical vapor deposition. X‐ray diffraction, selective‐area electron diffraction, and transmission electron microscopy were used to confirm the single‐crystal nature of [111]‐oriented single‐crystal Y3Al5O12 thin films. We determined that the epitaxial relationship between the film and the substrate is (111)[110]Y3Al5O12//(111)[110]Gd3Ga5O12.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6306fee5d2a37b58fd69c422a341f05b https://doi.org/10.1063/1.111805 Zobrazit plný text záznamu