Vertical integration of high-silica channel waveguides on Si

Autor:	P. J. R. Laybourn, G. Barbarossa
Rok vydání:	1992
Předmět:	Materials science Silicon business.industry Physics::Optics chemistry.chemical_element Substrate (electronics) Vertical integration Waveguide (optics) High silica Planar chemistry Optoelectronics business Electronic circuit Communication channel
Zdroj:	Integrated Photonics Research.
DOI:	10.1364/ipr.1992.wb8
Popis:	The density of optical functions available on the same substrate and the complexity of the integrated optical circuits conceivable would benefit from the extension of the optical interaction to a third dimension. Recently, vertical integration of Si planar waveguides on Si has been reported. However, no experimental evidence of vertical integration of channel waveguides has been reported in the literature so far, to our knowledge.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::62bdbc51c285e44270ef542e5de13042 https://doi.org/10.1364/ipr.1992.wb8 Zobrazit plný text záznamu