Effect of forbidden light on subsurface IC imaging

Autor:	Bennett B. Goldberg, Abdulkadir Yurt, M. Selim Ünlü, T. Berkin Cilingiroglu, Aydan Uyar
Rok vydání:	2014
Předmět:	Point spread function Subsurface imaging Physics Total internal reflection Laser linewidth Optics business.industry Microscopy High numerical aperture business Image resolution Refractive index
Zdroj:	Frontiers in Optics 2014.
DOI:	10.1364/fio.2014.ftu1g.2
Popis:	Forbidden light, the cone of high-angle light formed above critical angle, plays a critical role in near-interface high numerical aperture imaging. We investigate its effect in subsurface imaging in aplanatic solid immersion microscopy on ICs.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::62bd3888377caeda9957f548640600c3 https://doi.org/10.1364/fio.2014.ftu1g.2 Zobrazit plný text záznamu