Production of Doubly Charged Ions Using a Hollow Cathode Ion Source with an Evaporator

Autor:	D. Mączka, B. Słowiński, Krzysztof Pyszniak, A. Droździel, Marcin Turek
Rok vydání:	2013
Předmět:	Materials science General Physics and Astronomy Ion current Anode voltage Cathode Ion source Ion law.invention Electric arc Physics::Plasma Physics law Atomic physics Evaporator Moderate-Dose
Zdroj:	Acta Physica Polonica A. 123:843-846
ISSN:	1898-794X 0587-4246
Popis:	The paper describes the production of doubly charged ions from solids and gases using a hollow cathode ion source with an internal evaporator heated by a spiral cathode lament and arc discharge. The obtained currents were 15 μA for Bi, 10 μA for As and Al, 8 μA for Kr and Xe, 5 μA for In and Ge, enabling moderate dose implantations (≈ 10 cm−3) with doubly charged ions. Characteristics of the ion source are presented and discussed in order to choose the optimal working parameters. A brief presentation of numerical model of doubly and singly charged ions in the ion source is given. The calculated results (dependences of ion current on the anode voltage) are in good agreement with the experimental data.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::62ae03a0491ba9eb07a32a85fa2e3aed https://doi.org/10.12693/aphyspola.123.843 Zobrazit plný text záznamu Plný text ve formátu PDF