B5.4 - First Investigation of LTCC package for high temperature SAW sensors

Autor: Goran Miskovic, A. Binder, Goran Radosavljevic, Sasa Toskov, J. Bardong
Rok vydání: 2015
Předmět:
Zdroj: Proceedings SENSOR 2015.
DOI: 10.5162/sensor2015/b5.4
Popis: SAW temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 500°C.
Databáze: OpenAIRE