Deposition of Diamond Film on Aluminum Nitride Ceramics and the Study of Their Thermal Conductance
Autor: | Hong Chen, Ji-fa Zhang, Rong-chuan Fang, Jing-biao Cui |
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Rok vydání: | 1996 |
Předmět: | |
Zdroj: | Chinese Physics Letters. 13:625-628 |
ISSN: | 1741-3540 0256-307X |
DOI: | 10.1088/0256-307x/13/8/018 |
Popis: | Diamond films (DF) have been deposited on AlN ceramic substrates by hot filament chemical vapour deposition method. The diamond nucleation on AlN ceramics has been investigated. A nucleation density more than 108 cm-2 was obtained on this kind of insulating polycrystalline substrate under common deposition conditions. The thermal conductance of the DF/AlN compound materials has been studied by photothermal deflection technique. The thermal diffusivity of the DF/AlN is higher than that of the AlN ceramics, and will increase as the diamond films grow thicker. |
Databáze: | OpenAIRE |
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