Deposition of Diamond Film on Aluminum Nitride Ceramics and the Study of Their Thermal Conductance

Autor: Hong Chen, Ji-fa Zhang, Rong-chuan Fang, Jing-biao Cui
Rok vydání: 1996
Předmět:
Zdroj: Chinese Physics Letters. 13:625-628
ISSN: 1741-3540
0256-307X
DOI: 10.1088/0256-307x/13/8/018
Popis: Diamond films (DF) have been deposited on AlN ceramic substrates by hot filament chemical vapour deposition method. The diamond nucleation on AlN ceramics has been investigated. A nucleation density more than 108 cm-2 was obtained on this kind of insulating polycrystalline substrate under common deposition conditions. The thermal conductance of the DF/AlN compound materials has been studied by photothermal deflection technique. The thermal diffusivity of the DF/AlN is higher than that of the AlN ceramics, and will increase as the diamond films grow thicker.
Databáze: OpenAIRE