Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices
Autor: | SandeepSeema Saseendran, Abhilash Paneri, Bert Tobback, Bogumila Kutrzeba-Kotowska, Emma Vecchio, Geraldine Jamieson, Vasile Paraschiv, HyoSeon Suh, Bruno Figeys, Masaki Fujikane, Atsushi Himeno, Kunihiko Nakamura, Naoki Tambo, Yuki Nakata, Hiroyuki Tanaka, Yasuyuki Naito, Kouhei Takahashi, DenizS Tezcan |
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Rok vydání: | 2020 |
Zdroj: | Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials. |
Databáze: | OpenAIRE |
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