| Popis: |
Geometrical nonlinearity of a fine objective lens′ bellows actuator was analyzed with finite element method,and characteristics of bellows actuator were evaluated by linearity.Geometric nonlinear deformations of some common bellows(U shape,S shape,C shape,rectangle shape and triangle shape) were analyzed via the finite element method,the stoke and linearity of these actuators were obtain with the least square method.The results show that: the S shaped bellows,of which linearity is up to 0.161%,is the best one for large stoke bellows actuator,and the triangle shaped bellows,of which linearity is up to 0.135%,is the best one for small stoke bellows actuator. |
