Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method
| Autor: | Chun-Lin Lu, Meng-Kao Yeh, Pei-Rong Ni |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Microphone Acoustics Capacitive sensing Diaphragm (mechanical device) 02 engineering and technology Spring (mathematics) musculoskeletal system 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Shock (mechanics) Stress (mechanics) Taguchi methods 0103 physical sciences Electrical and Electronic Engineering 0210 nano-technology Safety Risk Reliability and Quality Sensitivity (electronics) |
| Zdroj: | Microelectronics Reliability. :824-828 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/j.microrel.2018.06.110 |
| Popis: | The stress distribution and failure of CMOS-MEMS microphone under shock loading was investigated by finite element method in this study. The results show that corners of spring, the anchors connecting spring and fix end and the connection of the spring and diaphragm had higher stresses for MEMS microphone under shock loading. Four parameters, the width of anchor, the width of spring, the radius of diaphragm and the thickness of diaphragm, were chosen in stress analysis of MEMS microphone by Taguchi method. Each parameter has lower, middle and higher levels. The case with higher width of anchor, width of spring, thickness of diaphragm and lower radius of diaphragm has smaller stress, 35% less than that of the original design; the case with middle width of anchor, lower width of spring, higher radius of diaphragm and thickness of diaphragm has 7.3 times of microphone capacitive sensitivity than that in the original design. Drop test experiment was performed to verify the simulation results according to the JEDEC standards, JESD22-B111 and JESD22-B110B. The results obtained in this study can give useful suggestions for improving the design and robustness of MEMS microphone. |
| Databáze: | OpenAIRE |
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