Thermal Stability of PIII Deposited Hard-Coatings with Compositions Between Diamond-Like Carbon and Amorphous Silicon-Carbonitride

Autor:	M. Kuhn, Florian Schwarz, Bernd Stritzker, Götz Dipl.-Phys. Thorwarth, C. Hammerl
Rok vydání:	2007
Předmět:	Materials science Polymers and Plastics Diamond-like carbon Metallurgy chemistry.chemical_element Condensed Matter Physics Amorphous solid Carbon film Amorphous carbon chemistry Chemical engineering visual_art visual_art.visual_art_medium Thermal stability Ceramic Thin film Carbon
Zdroj:	Plasma Processes and Polymers. 4:S254-S258
ISSN:	1612-8869 1612-8850
DOI:	10.1002/ppap.200730712
Popis:	By increasing the addition of Si and N to diamond-like carbon (DLC), the amorphous ceramic silicon-carbonitride (SiCN) can be obtained. An advantage of SiCN compared to DLC is its high thermal stability, represented by a crystallisation temperature of 1 500 °C and its increased oxidation resistance. To investigate the thermal stability of a-SiCN:H thin films, samples with different carbon contents have been produced by plasma immersion ion implantation and deposition (PIII&D). The films have been annealed at temperatures up to 1 000 °C in O2 as well as Ar. By examining the chemical composition, bonding structure and mechanical properties, a distinct carbon fraction could be determined, which marks the transition from (doped) a-C:H with low thermal stability to a-SiCN:H with high temperature resistance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::61ee238f0780766383963fd43e0c0030 https://doi.org/10.1002/ppap.200730712 Zobrazit plný text záznamu Plný text