Al doped zinc oxide thin films on polymer substrates deposited by inductively coupled plasma assisted reactive sputtering

Autor:	Jung-Joong Lee, Dong-su Jang, Seung-jae Jung
Rok vydání:	2012
Předmět:	Materials science Sputtering Electrical resistivity and conductivity Doping Analytical chemistry General Physics and Astronomy Polymer substrate Deposition (phase transition) General Materials Science Sputter deposition Thin film Inductively coupled plasma
Zdroj:	Current Applied Physics. 12:S118-S122
ISSN:	1567-1739
DOI:	10.1016/j.cap.2012.05.011
Popis:	Al doped ZnO (AZO) thin films with low electrical resistivity and high optical transmittance were successfully produced by inductively coupled plasma (ICP) assisted reactive DC magnetron sputtering at low deposition temperatures using a process control system. Although there was a hysteresis behavior during deposition, a stable process was achieved using the target voltage control method in the transition region. The electrical and optical properties of the AZO films deposited at various target voltages were measured. The AZO films showed a low electrical resistivity of ∼1 × 10 −3 Ω cm and a high optical transmittance of ∼80% even on polymer substrates such as poly carbonate (PC) and poly ether sulfone (PES).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::61df4a9dc8f1cd7cb4c11aa40123e60a https://doi.org/10.1016/j.cap.2012.05.011 Zobrazit plný text záznamu Full Text from ScienceDirect