Level-set strategy for inverse DSA-lithography
| Autor: | Gaddiel Ouaknin, Glenn H. Fredrickson, Kris T. Delaney, Nabil Laachi, Frederic Gibou |
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| Rok vydání: | 2018 |
| Předmět: |
Numerical Analysis
Physics and Astronomy (miscellaneous) Computer science Applied Mathematics Inverse Context (language use) 010103 numerical & computational mathematics 02 engineering and technology Inverse problem 021001 nanoscience & nanotechnology 01 natural sciences Computer Science Applications Computational Mathematics Level set Template Modeling and Simulation Field theory (psychology) Shape optimization 0101 mathematics 0210 nano-technology Algorithm Lithography |
| Zdroj: | Journal of Computational Physics. 375:1159-1178 |
| ISSN: | 0021-9991 |
| Popis: | We introduce a level-set strategy to find the geometry of confinement that will guide the self-assembly of block copolymers to a given target design in the context of lithography. The methodology is based on a shape optimization algorithm, where the level-set normal velocity is defined as the pressure field computed through a self-consistent field theory simulation. We present numerical simulations that demonstrate that this methodology is capable of finding guiding templates for a variety of target arrangements of cylinders and thus is an effective approach to the inverse directed self-assembly problem. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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