ZnO nanostructured 2D layered SAW based hydrogen gas sensor with enhanced sensitivity
| Autor: | Argha Sarkar, Nimmala Harathi, S. Kavitha |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Hydrogen Acoustics chemistry.chemical_element 02 engineering and technology General Medicine Sense (electronics) 021001 nanoscience & nanotechnology 01 natural sciences Displacement (vector) Finite element method Acceleration chemistry 0103 physical sciences Computer Science::Networking and Internet Architecture Surface acoustic wave sensor Sensitivity (control systems) 0210 nano-technology |
| Zdroj: | Materials Today: Proceedings. 33:2621-2625 |
| ISSN: | 2214-7853 |
| DOI: | 10.1016/j.matpr.2020.01.150 |
| Popis: | Surface acoustic wave sensors have wide variety of applications. The application of SAW sensors includes measurement of different physical parameters like temperature, torque, acceleration, pressure, humidity etc. SAW sensor can also be used as gas sensor with certain construction constrains. The performance of gas sensor can be increased by adding nanomaterial to the MEMS (Micro-Electro Mechanical Systems) based gas sensor. In this study a 2D Surface Acoustic Wave sensor is designed to sense hydrogen gas. The sensor is designed with zinc oxide (ZnO) as sensing layer to increase the sensitivity. The performance of sensor is evaluated with gas and without gas with respect to the displacement and operating frequency. The maximum displacement obtained by the sensor is 0.00857 µm at the operating frequency of 30 MHz in absences of gas and 0.00502 µm displacements in presences of gas at the same operating frequency. Analysis of sensor is done with Finite Element Modeling (FEM). The sensor is simulated with COMSOL Multi Physics. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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