| Autor: |
K-D. Lang, M. Schneider Ramelow, J. Bickel, Ha-Duong Ngo |
| Rok vydání: |
2019 |
| Předmět: |
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| Zdroj: |
2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC). |
| DOI: |
10.23919/empc44848.2019.8951872 |
| Popis: |
Three-dimensional printing and rapid prototyping are becoming more and more important in the field of research and low volume production. There are many systems that can print a wide variety of materials. In the field of thin-film technology, as required for MEMS applications, only a few approaches are available. One of the promising technologies in this field is sputtering at atmospheric pressure with miniaturized plasma sources. This paper introduces a new anode nozzle geometry that increases the productivity of this novel technology substantial. It shows that three-dimensional thin-film metal structures can be printed more economically. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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