Isolated emitter AlGaAs/GaAs HBT integrated with emitter-down HI/sup 2/L technology

Autor: C.T.M. Chang, D.L. Plumton, B.O. Woods
Rok vydání: 1989
Předmět:
Zdroj: IEEE Electron Device Letters. 10:508-510
ISSN: 1558-0563
0741-3106
DOI: 10.1109/55.43119
Popis: A process that integrates isolated-emitter heterojunction bipolar transistors (HBTs) with common-emitter HBTs in the emitter-down epi structure on n/sup +/ substrates is discussed. Overgrowth of the epi onto a p/sup -/ implanted region results in back-to-back diodes for approximately 12-V vertical isolation. Isolated transistors are used in emitter-follower output buffers for heterojunction injection logic (HI/sup 2/L) ring oscillators, demonstrating the integration of the two transistor types. >
Databáze: OpenAIRE