Influence of Phase State, Conducting Sublayer Material and Deposition Method on Mechanical Properties and Adhesion of Ge2sb2te5 Thin Films
| Autor: | Alexey Yakubov, Petr Lazarenko, Elena Kirilenko, Irina Sagunova, Alexey Babich, Alexey Sherchenkov |
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| Rok vydání: | 2023 |
| Databáze: | OpenAIRE |
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