Sensitivity Enhancement in Resonant Microbolometers with Dual Mode Operation

Autor:	Kivanc Azgin, Onurcan Kaya
Rok vydání:	2020
Předmět:	Materials science business.industry Bolometer Dual mode Mode (statistics) Microbolometer 02 engineering and technology 021001 nanoscience & nanotechnology law.invention Nonlinear system Amplitude Optics Normal mode law Sensitivity (control systems) 0210 nano-technology business
Zdroj:	2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF).
DOI:	10.1109/ifcs-isaf41089.2020.9234930
Popis:	This study proposes a novel “vibration amplitude” based sensitivity enhancement method for a resonant-plate microbolometer, which operates in two different mode shapes simultaneously (dual-mode). Thanks to nonlinear cross-coupling between the two resonant modes, the proposed method boosts up the sensitivity of the second operational mode by 25.6% compared to conventional amplitude-based sensing.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::60b56f3f044d4c4c3d3a073f3334b9bf https://doi.org/10.1109/ifcs-isaf41089.2020.9234930 Zobrazit plný text záznamu