3D Simulation Software for Visualization of MEMS Microfabrication Processes
| Autor: | Fernando Tsuda, Fábio Belotti Colombo, Rafael Garib Jankauskas, Marcelo Nelson Páez Carreño, Pedro Kayatt, Douglas F. De Souza, Paula M. Hokama |
|---|---|
| Rok vydání: | 2008 |
| Předmět: | |
| Zdroj: | ECS Transactions. 14:99-108 |
| ISSN: | 1938-6737 1938-5862 |
| DOI: | 10.1149/1.2956023 |
| Popis: | In this paper we present a software for 3D visualization and simulation of the microfabrications process utilized in micro-electro-mechanical systems (MEMS) development. The simulations are based on a geometric approach and, differently from other academic and free distributed tools, the software include modules for simulation of both, bulk and surface micromachining, and for atomistic visualization of etched crystalline structures. Sophisticated rendering tools for coloring, illumination and transparency, as well as, tools to create and edit arbitrary 2D geometries and 3D solids were implemented. Related to the simulation capabilities, the bulk micromachining module lead with the anisotropic etching of (100) oriented Si substrates in alkaline solutions (KOH). The surface micromachining module works with the deposition and etching of up to 6 levels of structural and sacrificial films, which can be deposited on surfaces with complex 3D topography, and simulate the etching of sacrificial layers through etch holes in a structural layer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|