Microscopic characterization of ablation craters produced by femtosecond laser pulses

Autor:	Boris Kogan, Dietrich von der Linde, Joerg Seekamp, Vassili Temnov, Andreas Schlarb, Bastian Weyers, Nikola Stojanovic, Klaus Sokolowski-Tinten, Clivia Sotomayor-Torres, Sergei I. Kudryashov, Rolf Moeller
Rok vydání:	2002
Předmět:	Femtosecond pulse shaping Laser ablation Materials science business.industry medicine.medical_treatment Laser Ablation law.invention X-ray laser Optics Impact crater law Femtosecond Ultrafast laser spectroscopy medicine business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.482062
Popis:	The formation of well-defined craters is a general feature of laser ablation with ultrashort laser pulses, indicative of a sharp ablation threshold. Results of a microscopic characterization of ablation craters on semiconductors after irradiation with single intense ultrashort laser pulses are presented.
Databáze:	OpenAIRE
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