The Study of Ag Thin Film of Suitable Anode for T-OLED: Focused on Nanotribology Methode
| Autor: | Jin Woong Jeon, Joo Young Kim, Ji Won Son, Yong Wook Kang, Min Chul Kim, Kyu-young Lee, Ku Eun Kwon, Chang Woo Lee, Soo In Kim |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Materials science
business.industry Materials Science (miscellaneous) Nanotechnology Substrate (electronics) Thermal treatment Condensed Matter Physics Sputtering Nanotribology OLED Optoelectronics Work function Electrical and Electronic Engineering Physical and Theoretical Chemistry Thin film business Sheet resistance |
| Zdroj: | Journal of the Korean Vacuum Society. 21:328-332 |
| ISSN: | 1225-8822 |
| DOI: | 10.5757/jkvs.2012.21.6.328 |
| Popis: | The work function of Ag (silver) is too low (~4.3 eV) to be used as an electrode of T-OLED (Top Emission Organic Light Emitting Diode). To solve this weakness, researches used plasma-, UV-, or thermal treatment on Ag films in order to increase the work function (~5.0 eV). So, most of studies have focused only on the work function of various treated Ag films, but studies focusing on nanomechanical properties were very important to investigate the efficiency and life time of T-OLED etc. In this paper, we focused on the mechanical properties of the Ag and film. The Ag was deposited on a glass substrate with the thickness of 150 nm by using rf-magnetron sputter with the power was fixed at 100 W and working pressure was 3 mTorr. The deposited Ag film was UV treated by UV lamp for several minutes (0~9 min). We measured the sheet resistance and mechanical property of the deposited film. From the experimental result, there were some differences of the sheet resistance and surface hardness of Ag thin film between short time (0~3 min) and long time UV treatment. These result presumed that the induced stress was taken place by the surface oxidation after UV treatment. |
| Databáze: | OpenAIRE |
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